Parts Clean
Xplaim-ST-PTC
Equipment Overview
Mainly for cleaning semiconductor process equipment components (quartz, stainless steel, silicon, seeds, etc.)
Customized tanks (size/material) and chemical solutions based on components and contaminants
Optional robotic arms, flower baskets for automatio
Wide applicability
Suitable for various types of components
Applicable to various chemical solutions
Select suitable materials according to different chemical solutions to meet diverse cleaning requirements
Customization
Configure functions such as ultrasonic, circulation, filtration, bubbling, heating, etc. according to cleaning process requirements
Automation
Configure functions such as ultrasonic, circulation, filtration, bubbling, and heating in accordance with cleaning process requirements