Horizontal Tube Clean
Xplaim-ST-HTC
Equipment Overview
Mainly used for furnace tube cleaning in processes such as oxidation, diffusion, stripping growth, annealing, epitaxy, etc.
Applicable chamber
Applicable to 6” to 12” furnace tubes and also suitable for cleaning other small components
Excellent cleaning uniformity
Rolling immersion cleaning with excellent uniformity
High automation level
Equipped with a robotic arm for automatic transfer and cleaning between tanks
Customizable
Customizable design available according to customer requirements (including customization of tank quantity, chemical solution supply function, chemical recovery tank, etc.)