Automatic Wet Bench Equipment ---Cassette Type
Xtrim-BC-A300
Xtrim-BC-A200
Xtrim-BC-A150
Equipment Overview
Load/Unload、Chemical Baths（SPM、HF、SC1、SC2 、BOE、H3PO4 、EKC、NMP…)、QDR 、 IR Dryer、Marangoni Dryer 、 Robot、Transfer…
Support Tools: CDS、LCDS
Customizable
Adaptable to various chemical solutions
Customizable tanks
High Throughput
Supports mass production with 25/50 wafers
Multiple robots operate collaboratively
Compatibility
Supports wafers from 8”to 12”
Can be applied to substrate manufacturing, integrated circuits and advanced packaging
Flexibility
Supports Open Cassette、SMIF、FOUP to load/unload
Modular design meets diverse process requirements