Automatic FOUP/FOSB Cleaning System
Xtrim-FC-A400
Equipment Overview
Suitable for fully automatic cleaning of Frame FOUPs; the equipment is equipped with a dedicated Load/Unload system and supports fully automatic cleaning and management via RFID, etc.
1、Supports AMHS for fully automatic cleaning;
2、Compatible with Frame FOUPs of various brands;
3、Low COO;
4、Customized nozzle design ensures cleaning effectiveness