ENEPIG Electroless Plating Equipment
Xtrim-ENEPIG-300/200/150
Equipment Overview
Load/Unload、Pretreatment Unit、Ni/Pd/Au Dual Tank Unit、IPA Dryer/Marangoni Dryer、Auto CDS&PM Unit、Online Analyzer
Customizable
Diversified process matching
Supports the application of over 20 types of chemical solutions
Both linear and L-shaped layouts are available
Turn-Key
Cooperation with ATO Tech and NOVA，provides a full-process solution of equipment + chemical solutions + analysis
Excellent Uniformity
Self-developed 3D vibrating system+ a unique uniform flow tube design, the plating layer uniformity is ≤ 5%
High Throughput
Supports the dual CST design to maximize throughput
Multiple sets of machinery work concurrently, eliminating product waiting time
Dual NiPdAu tanks, no throughput loss during preventive maintenance (PM)
Automated
Supports OHT/AGV and achieves fully automated loading and unloading
Fully automated chemical solution make up and preventive maintenance (PM)
Fully automated analysis and chemical solution replenishment
Industry Certification
SEMI S2
CE