Xtirm-FC-300 概览
Xtirm-FC-300 Overview
技术实力雄厚，专业的营销设计团队
Strengthen service. sales & marketing, design expertise
质量认证
Manufacture cleaners under ISO 9001 quality control IS09001
操作简便、维护成本低
Reduce overhead costs and more efficient operations
交货周期短，技术支持迅捷
Provide shorter lead-time and improvedtechnical support
半导体行业客户认可度高
Highly focused on repeat orders from existing semi customers
Xtrim-FC-300 介绍
Xtrim-FC-300 introduction
在清洗机行业超25年经验
Over 25 years of experience in cleaning equipment business
在上海，苏州有完善的服务和销售团队
Full sales and warranty support in Shanghai
自主研发设计，生产、服务，可用于片盒、FOUP、光罩盒清洗
Designed,manufactured and serviced box/-FOUP/FOSB/MASKPOD cleaners
产品特点
Features
3rd Generation process cleaner for 50mm - 300m wafer handing products
针对2-12寸晶圆的第三代清洗设备
High-purity materials, PP, PVDF 316 suS, etc
适用于各种材质盒子，包括PP、PVD......
Front load/unload, or optional front load & back unload ftor bulk mounting
前载/前卸、前载/后卸等多种设计模式
Standard heated blower drying usingfab air
标准厂务热空气干量
Optional heated CDAN2 drving
热CDA、N2干燥可选
Standard ambient DIW cleaning
标准DIW清洗容器
Small footprint ideal for cleanroom
无尘室尽可能小的占地设计
Maximum throughput in the industry
产能尽可能大的设计
Outstanding local support and spare parts avalilbility
技术支持实力雄厚，备件齐全
Lowestmaintenance,high MTBF &uptime
维护成本低，故障率低
-Manually load shipping boxes, Mask Pod or other wafer handling products in the custom-designed racks in the machine
手动取放盒子，可根据客户要求设计方案
-Washing, rinsing and drving are fuilly automated when the operator verifies that the parts are securely loaded on all four racks and the machine door closed properly, before pressing the GO button on thetouch screen
自动化洗烘，一键启动
All spinning speeds and directions will be automatically controled through the HMI
人机界面控制参数